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Semiconductor Solutions

Epitaxial Thermocouples

BASF’s Fibro® Platinum wire can decrease thermocouple failures prior to preventative maintenance on epitaxial reactors, which lowers cost by reducing the need to take the system down prematurely. Customers around the world have reported lifespan increases up to 80% over conventional epitaxial thermocouples.

Epitaxial Thermocouples Brochure

BASF has long been a leading supplier of thermocouples for use in epitaxial reactors. We offer a variety of epitaxial thermocouple product lines to help our customers to be more successful. The X product family of epitaxial thermocouples has been successfully used by many customers. The X3 product series is the next generation of epitaxial thermocouple technology, engineered for longevity. It is being used by OEM as well as IC suppliers.

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Language: english

Categories: Temperature Sensing, Semiconductor Solutions

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Exactus® Semiconductor Brochure

BASF Exactus® optical thermometers provide critical semiconductor process temperature information that drives better process yields and increases profitability. Exactus technology stands out because of its industryleading capabilities.

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Language: english

Categories: Temperature Sensing, Semiconductor Solutions

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Profile & Spike Thermocouples

BASF has long been a leading supplier of thermocouples to the semiconductor industry. We offer profile and spike thermocouples for all major furnaces including Tel, Kokusai, ASML, ASM, and others. As the precious metal experts, we help our customers to be more successful.

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Language: english

Categories: Temperature Sensing, Contact Thermocouples, Semiconductor Solutions

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Thermocouples for the Semiconductor Industry Product Information

BASF has long been a leading supplier of profile, spike and epitaxial thermocouples to the semiconductor industry. We offer profile and spike thermocouples for furnaces including Tel, Kokusai, ASML, ASM, and others. BASF precious metal thermocouples utilize R, S, B, PII, and K-type wires. Platinel® thermocouple wire is a proprietary precious metal combination developed by BASF.

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Language: english

Categories: Temperature Sensing, Heat Treating Solutions, Semiconductor Solutions

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Thermocouples Semiconductor Brochure

BASF supplies profile thermocouples to both manufacturers of original equipment and to end users. We have long been a leading supplier of profile and spike thermocouples, and epitaxial thermocouples to the semiconductor industry. We offer profile and spike thermocouples for furnaces including Tel, Kokusai, ASML, and ASM.

File: pdf (11.221 MB)

Language: english

Categories: Temperature Sensing, Semiconductor Solutions

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