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Profile and Spike Thermocouple

BASF has long been a leading supplier of profile and spike thermocouples for diffusion furnaces in the semiconductor industry.

We supply end users with profile and spike thermocouples for diffusion furnaces such as:

  • Tel
  • Kokusai
  • ASML
  • ASM

Many designs, originally develops to satisfy the needs of a particular application, have subsequently proved to offer much broader benefits and have become accepted as standard by the industry. We work with end users to customize their traditional and multi-junction thermocouples for longevity.

Custom Engineering

Technical assistance is available to solve speficic temperature measurement problems or to provide guidance on the most cost-effective solution.

Calibration Service and Repairs

Each profile thermocouple is supplied with a calibration report traceable to National Standards Laboratories and conforming to the latest national and international specifications and criteria. Periodic recalibration and certification on a six-month cycle is good practice, particularly in applications suject to rigorous quality assurance requirements.

All our Thermocouples comply with British Standards BS 4937.2/NBS 25/IEC584 Class 1 for types R and S and Class 2 for type B.

Precision, according to said Norms is as follows:

Type "R" and "S"

  • up to 1100°C +/- 1.0°C
  • at 1200°C +/- 1.3°C
  • at 1300°C +/- 1.6°C

Type "B"

  • up to 1100°C +/- 2.75°C
  • at 1200°C +/- 3°C
  • at 1300°C +/- 3.25°C

Calibration Modes

Mode 2 Temp to be added to obtain correct temp Mode 4 Absolute measured temp Mode 6 Millivolts deviation vs temp Mode 7 Microvolts to be added to obtain correct temp Mode 8 Microvolts deviation vs temp

Certificate of Conformity can be issued each thermocouple assembly. This will enable the user of the thermocouple to have much more precise temperature control of the furnace operating zone than that achievable with the standard calibration tolerances of the Norms indicated above, with an evident associated benefit.

Our Laboratory can perform calibrations, both at fixed points and by comparison versus Standards, up to accuracy better than 0,2 °C. We can make metallurgical and physical investigations on used Thermocouples, which may help the customer to understand the reason of a failure or of an unexpected measurement drift.

Qualification

Platinum Sensors has been appointed by Tokyo Electron Europe Ltd, as a Qualified Supplier for the Manufacturing of Thermocouples for their Diffusion Furnaces.