BASF Catalysts offers exceptional expertise in the development of technologies that protect the air we breathe, produce the fuels that power our world and ensure efficient production of a wide variety of chemicals, plastics and other products including advanced battery materials. BASF’s Catalysts division is the world’s leading supplier of environmental and process catalysts. The group offers exceptional expertise in the development of technologies that protect the air we breathe, produce the fuels that power our world and ensure efficient production of a wide variety of chemicals, plastics and other products, including advanced battery materials. We believe mobility’s future lies in more than just products. So where others come to a full stop, we’re just getting started—by leveraging the full power of BASF to continually advance our comprehensive package of sustainable solutions that enable us to travel further, as well as above and beyond. A leading supplier of high performance cathode active materials (CAM) for electrified vehicles to battery producers and automotive OEMs around the world. Protecting the air we breathe from harmful emissions through innovation. BASF leverages unsurpassed expertise in the development of emission control technologies for a wide range of market applications. BASF is committed to advancing and promoting environmentally-sound technologies to achieve a sustainable future in aviation. Offering 50 years of experience developing intelligent solutions for air quality over a wide range of applications — enabling clean air for a healthier, more sustainable future. As the global leader in chemical catalysts, BASF develops cutting-edge catalyst chemistry with our customers’ needs in mind. BASF offers the widest portfolio of adsorbent technologies for a broad spectrum of applications in industries such as refining, petrochemical, chemical, and gas processing. At BASF, our Fluid Catalytic Cracking (FCC) catalyst and additive offerings together with our expert technical services build the right solution to create value within any unit’s constraints. Paving the way toward a brighter, more secure future. Manufacturing products for sustainable solutions, reducing emissions from our processes, and using non-fossil fueled energy sources – all of these efforts help lead BASF on a continuing journey of sustainability. BASF Natural Gas experts have a diverse portfolio of products to custom design a solution and help you meet your Natural Gas treatment needs. BASF has been serving the natural gas treatment market for over 60 years. With more than 150 years of experience in metal sourcing, trading, and hedging, we’ve built tangible results for our industrial customers. With more than 100 years of experience in recycling materials, BASF’s end-to-end recycling program is known and trusted around the globe. As a leader in precious-metal thermocouples for many years, BASF recently applied its technological expertise to optical-based temperature measurement. With nearly 50 years of experience, we offer reliability and efficient solutions for the treatment of various gases. BASF Sorbead® Air adsorbents are alumino silicate gels in the form of hard, spherical beads. They are essential in removing water from compressed air so that the efficiency of chemical processes is not compromised. Sorbead® Air is the most energy saving and environmentally friendly adsorbent available for the air compression industry. Innovative, step-change technology with dual-purpose performance: removal of heavy hydrocarbons and water to cryogenic specifications in a single unit. Developing and producing pharmaceutical ingredients for more than 75 years, enabling us to provide the solutions you need to meet today's and tomorrow's challenges for your pharmaceutical business. Find the latest news and media information for BASF’s Catalysts division, headquartered in Iselin, New Jersey, USA, the world’s leading supplier of environmental and process catalysts.
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Semiconductor Industry

BASF has consistently been a leading provider of Precious Metal (PM) thermocouples for the semiconductor industry. We partner with our customers to provide customized thermocouple designs from tailoring PM scrap to rebuilding programs based on customer requirements.

The quality of BASF's Fibro® platinum wire keeps costs down and lifespans high—up to 80 percent higher than conventional epitaxial thermocouples. Meanwhile, the precise temperature information provided by BASF EXACTUS® optical thermometers can lead to better performance and increased profitability.

BASF Catalysts | Semiconductor

Semiconductors and temperature control work simultaneously

We understand that semiconductors processing equipment and temperature control go hand-in-hand. EXACTUS® optical thermometers are manufactured in our state-of-the-art facility in Fremont, California, where every instrument is built with the highest degree of quality.

We also maintain a world-class research and development lab in Portland, Oregon, dedicated exclusively to R&D optical thermometry. Highly-experienced staff scientists ensure exacting standards are maintained, in addition to supporting customers and developing breakthrough products. Contact us to learn more about how our ingenuity can help you meet today’s—and tomorrow’s—process needs.

Leading supplier of precious metal thermocouples

BASF has long been a leading supplier of profile, spike, solar, and epitaxial thermocouples. BASF commitment to adhere to strict assembly process control has led to repeatable, and consistent product to our global customer base.

We offer profile thermocouples for characterization of diffusion furnaces for Tokyo Electron Limited (TEL), Kokusai, ASM, AMTECH Group, and SPTS Micro. BASF precious metal thermocouples utilize Fibro®, R, S, B, PII, and K-type wires. Platinel® thermocouple wire is a proprietary precious metal combination developed by BASF.

BASF is committed to providing innovative designs, exceptional quality, rapid deliveries and competitive pricing. Contact our team today for recommendations about your unique needs, including made-to-order, custom-designed thermocouple assemblies – our specialty.

BASF Catalysts | Semiconductor
BASF Catalysts | Semiconductor

Epitaxial thermocouples: Reducing grain growth

Our X3-Fibro® epitaxial thermocouples achieve their longevity through the use of BASF proprietary Fibro® Platinum wire designed to reduce grain growth which can contribute to the mechanical failure of thermocouple wires through necking down or flattening of the wire near the bead, or open junctions.

BASF Catalysts | Epitaxial thermocouple

Epitaxial thermocouple

Fibro® Platinum wire can decrease thermocouple failures prior to preventative maintenance on epitaxial reactors, which lowers cost by reducing the need to take the system down prematurely. Customers around the world have reported lifespan increases up to 80% over conventional epitaxial thermocouples.

Fibro® Platinum wire retains the chemical and thermo-electric properties of reference/premium Platinum wire so quality remains the same. It can also increase throughput, since the thermocouple is designed to be more stable.

EXACTUS® Optical Pyrometer: A complete temperature measurement system

A leader in precious-metal thermocouples for many years, BASF more recently applied its technological expertise to optical-based temperature measurement. Designed primarily for OEM wafer-temperature measurement applications, the EXACTUS® optical pyrometers provide significant performance advantages in non-contact temperature measurement. Numerous pending patents cover these breakthroughs which result in industry-leading performance for accuracy, repeatability, and stability. Our performance advantage allows us to successfully measure processes in many applications which had been impossible.

EXACTUS® offers:

  • Low-temperature measurements (25°C and higher) using short wavelengths
  • Measurement of single crystal silicon down to 200°C using 900nm IR radiation
  • High precision with resolution up to 0.001°C and accuracy of 1.5°C
  • Speeds up to 1,000 readings per second
  • Broad dynamic range at any given wavelength

EXACTUS® instruments offer a complete temperature measurement system in each sensor head. State-of-the-art technology allows for custom-tailored integration to specific customer applications. In addition, the entire product line features a user-friendly design. Features that facilitate use include:

  • Readily configurable sensor housing
  • Flexible design
  • Customizable hardware, software, optics and probes
  • RS232, RS485/422, and Analog output from sensors
  • Sophisticated Windows-based graphical interface

Process Control Advantage

EXACTUS® technology delivers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. In addition, the instruments' high speed and high resolution provide better control and noise suppression, which results in better monitoring of wafer temperature and improved process results.

While designed for exacting semiconductor applications, EXACTUS® optical pyrometers may be suitable for a wide range of applications in other industries. Ultra-sensitive electronics, precision optics and the ability to measure low-temperatures using short wavelength allow for tighter process control, fewer emissivity errors and improved overall performance.

Semiconductor applications that are ideally suited for EXACTUS® pyrometers include:

  • RTP, RTA
  • Epitaxial (EPI)
  • MOCVD
  • MBE
  • Thin-film deposition
  • Laser and ultrasound medical technologies
  • Plastics welding

Optical Pyrometer

BASF EXACTUS® optical pyrometers provide critical process temperature information that drives better process yields and increases profitability. Exactus technology stands out because of its industry leading capabilities.

BASF Catalysts | Exactus

EXACTUS® optical pyrometer

Low temperatures (25ºC and higher) are measured using short wavelengths. EXACTUS® probes deliver high precision, with resolution up to 0.001ºC, accuracy of 1.5ºC and extremely low measurement drift. With speeds up to 1,000 readings per second, and a broad dynamic range at any given wavelength, Exactus temperature measurement solutions are well suited for the chemical industry.

BASF’s innovative technology offers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. Compact size and digital output allow Exactus sensors to be placed directly on or around a process tool, eliminating the need for fiber cables and improving process repeatability. Fiber cables are a primary source of measurement errors. In addition, the instrument’s high speed and high resolution provide better control and noise suppression. The result is better monitoring of wafer temperature and improved process results.

Profile and spike thermocouples: becoming an industry standard

BASF has long been a leading supplier of profile and spike thermocouples for diffusion furnaces in the semiconductor industry. We supply end users with profile and spike thermocouples for diffusion furnaces such as:

  • Tokyo Electron Limited (TEL)
  • Kokusai
  • ASM
  • AMTECH Group
  • SPTS Micro

Many designs, originally develops to satisfy the needs of a particular application, have subsequently proved to offer much broader benefits and have become accepted as standard by the industry. We work with end users to customize their traditional and multi-junction thermocouples for longevity.

Custom Engineering

Technical assistance is available to solve specific temperature measurement problems or to provide guidance on the most cost-effective solution.

Calibration Service and Repairs

Each profile thermocouple is supplied with a calibration report traceable to National Standards Laboratories and conforming to the latest national and international specifications and criteria. Periodic recalibration and certification on a six-month cycle is good practice, particularly in applications subject to rigorous quality assurance requirements.

All our Thermocouples comply with British Standards BS 4937.2/NBS 25/IEC584 Class 1 for types R and S and Class 2 for type B. Precision, according to said Norms is as follows:

Type "B"

  • up to 1100°C +/- 2.75°C
  • at 1200°C +/- 3°C
  • at 1300°C +/- 3.25°C

Type "R" and "S"

  • up to 1100°C +/- 1.0°C
  • at 1200°C +/- 1.3°C
  • at 1300°C +/- 1.6°C
BASF Catalysts | Semiconductor

Calibration Modes:

  • Mode 1 Temperature vs Millivolts
  • Mode 2 Temp to be added to obtain correct temperature
  • Mode 3 Full Range EMF (mV) vs Temperature (°C)
  • Mode 4 Absolute measured temperature
  • Mode 6 Millivolts deviation vs temperature
  • Mode 7 Microvolts to be added to obtain correct temperature

Certificate of Conformity can be issued each thermocouple assembly. This will enable the user of the thermocouple to have much more precise temperature control of the furnace operating zone than that achievable with the standard calibration tolerances of the Norms indicated above, with an evident associated benefit.

Our Laboratory can perform calibrations, both at fixed points and by comparison versus Standards, up to accuracy better than 0,2 °C. We can make metallurgical and physical investigations on used Thermocouples, which may help the customer to understand the reason of a failure or of an unexpected measurement drift.

Thermocouple Recycling Services

Precious metal thermocouples always have value—even when they are no longer usable. The metal content of thermocouples can be recycled into new replacements or monetary credit can be given for the user with book credit for use at a later date. All reclamations are made on a weight basis. For the most accurate and beneficial credit, spent thermocouples should be returned intact for disassembly at the plant so that proper material and alloy separation can be performed.

Thermocouple recycling makes BASF a full range service supplier. Contact us for specific details on how to return spent thermocouples.

Thermocouple Wire

BASF has supplied science and industry with thermocouple wire for many years. We maintain an expert team of metallurgists, metrologists and process application engineers. All BASF-produced thermocouple wire conforms to the latest version of international standards. For all combinations, the EMF-temperature relationships are in accord with the applicable IEC (International Electrotechnical Commission) Standards, which incorporate all major national institutions.

Our thermocouple wires are based on precious metals, long recognized as the most reliable sensing elements for high-temperature measurement.

Our major wire thermocouple combinations include:

Type S: Pt vs. Pt 10 Rh

One of the most popular and widely used precious metal thermocouple combinations is known for its high accuracy over a broad temperature range. The combination has excellent mechanical and chemical properties, low electrical resistivity, and is readily obtainable in uniform quality and in very fine diameters.

Type R: Pt vs. Pt 13 R

This widely used combination is almost identical to Type S except for a slightly higher thermoelectric output, which accommodates instruments that have been calibrated for this output.

Type B: Pt 6 Rh vs. Pt 30 Rh

This widely used thermocouple is very similar to other Pt and Rh combinations. It performs well at the higher application temperatures where other combinations may be subject to accelerated drift or physical degradation. It is unique in that, at reference junction temperatures below 100° C, compensating lead wire is generally not necessary: plain copper conductors are adequate.

Pt 20 Rh vs. Pt 40 Rh

An extremely stable combination for very high temperature use in problematical environments. Its low sensitivity (4 microvolts per °C) requires the use of direct EMF reading instruments. An excellent researcher's tool for high temperature measurement.

Platinel®

A development by BASF Catalysts that brings together the high electrical output of the high base alloys with the oxidation resistance and stability of the precious metals. Often used as a direct replacement for Type K in process control applications where long life, stability, and continuous trouble-free performance is required.

Type C

W3Re vs. W25Re and W5Re vs. W26Re - These refractory metal combinations provide the ability to measure and control temperatures up to 2800° C, limited only by the availability of suitable insulation. The W3Re/W25Re combination developed by BASF Catalysts introduced the concept of doping the low rhenium allow leg in order to improve ductility and handling. Today's improved version of the W5Re/W26Re combination is also doped for similar benefits.

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